USAF 1951 Glass Slide Resolution Targets
|
group
|
model
|
Number of lines (LP/mm)
|
type
|
material quality
|
Line width accuracy (um)
|
|
0-7 groups
|
ZXT-USAF1951
|
228
|
diffuse reflection
|
ceramics
|
±3um
|
|
0-7 groups
|
ZXG-USAF1951
|
228
|
Transmissive type
|
soda glass
|
±1um
|
|
0-7 groups
|
ZXG-USAF1951
|
228
|
Transmissive type
|
soda glass
|
±0.5um
|
|
0-7 groups
|
ZXG-USAF1951
|
228
|
Transmissive type
|
quartz glass
|
±0.15um
|
|
0-7 groups
|
ZXG-USAF1951
|
228
|
Transmissive type
|
glass
|
±0.25um
|
|
-2-7 groups
|
ZXT-USAF1951
|
228
|
diffuse reflection
|
ceramics
|
±3um
|
|
-2-7 groups
|
ZXG-USAF1951
|
228
|
Transmissive type
|
glass
|
±1um
|
Resolution value corresponding to the group
| Group |
Element |
Resolution(lp/mm) |
Line Width(pm) |
| 0 |
1 |
1000 |
500.00 |
| 2 |
1.122 |
445.43 |
| 3 |
1.260 |
396.86 |
| 4 |
1.414 |
353.56 |
| 5 |
1.587 |
314.98 |
| 6 |
1.782 |
280.62 |
| 1 |
1 |
2.000 |
250.00 |
| 2 |
2.245 |
222.73 |
| 3 |
2.520 |
198.43 |
| 4 |
2.828 |
176.78 |
| 5 |
3.175 |
157.49 |
| 6 |
3.564 |
140.31 |
| 2 |
1 |
4.000 |
125.00 |
| 2 |
4.490 |
111.36 |
| 3 |
5.040 |
99.21 |
| 4 |
5.657 |
88.39 |
| 5 |
6.350 |
78.75 |
| 6 |
7.127 |
70.15 |
| 3 |
1 |
8.000 |
62.50 |
| 2 |
8.980 |
55.68 |
| 3 |
10.079 |
49.61 |
| 4 |
11.314 |
44.19 |
| 5 |
12.699 |
39.37 |
| 6 |
14.254 |
35.08 |
| 4 |
1 |
16.00 |
31.25 |
| 2 |
17.96 |
27.84 |
| 3 |
20.16 |
24.80 |
| 4 |
22.63 |
22.10 |
| 5 |
25.40 |
19.69 |
| 6 |
28.51 |
17.54 |
| 5 |
1 |
32.00 |
15.63 |
| 2 |
35.92 |
13.92 |
| 3 |
40.32 |
12.40 |
| 4 |
45.25 |
11.05 |
| 5 |
50.80 |
9.84 |
| 6 |
57.02 |
8.77 |
| 6 |
1 |
64.00 |
7.81 |
| 2 |
71.80 |
6.96 |
| 3 |
80.60 |
6.20 |
| 4 |
90.50 |
5.52 |
| 5 |
101.60 |
4.92 |
| 6 |
114.00 |
4.38 |
| 7 |
1 |
128.00 |
3.91 |
| 2 |
143.70 |
3.48 |
| 3 |
161.30 |
3.10 |
| 4 |
181.00 |
2.76 |
| 5 |
203.20 |
2.46 |
| 6 |
228.10 |
2.19 |
|
