Group | Element | Resolution(lp/mm) | Line Width(pm) |
-2 | 1 | 0.25 | 2000 |
2 | 0.2806 | 1781.9 | |
3 | 0.315 | 1587.3 | |
4 | 0.3536 | 1414.03 | |
5 | 0.3969 | 1259.76 | |
6 | 0.4454 | 1122.89 | |
-1 | 1 | 0.5 | 1000 |
2 | 0.5612 | 890.95 | |
3 | 0.63 | 793.65 | |
4 | 0.7071 | 707.11 | |
5 | 0.7937 | 629.96 | |
6 | 0.8909 | 561.23 | |
0 | 1 | 1 | 500 |
2 | 1.122 | 445.43 | |
3 | 1.26 | 396.86 | |
4 | 1.414 | 353.56 | |
5 | 1.587 | 314.98 | |
6 | 1.782 | 280.62 | |
1 | 1 | 2 | 250 |
2 | 2.245 | 222.73 | |
3 | 2.52 | 198.43 | |
4 | 2.828 | 176.78 | |
5 | 3.175 | 157.49 | |
6 | 3.564 | 140.31 |